Interdisciplinary Excellence Centre, Department of Applied and Environmental Chemistry, University of Szeged, Rerrich Béla tér 1, Szeged H-6720, Hungary Interdisciplinary Excellence Centre, Department ...
Abstract: In this paper, Monolithic Microwave Integrated Circuits (MMICs)-compatible $\mathrm{Si}_{3} \mathrm{~N}_{4}$-based metal-insulator-metal (MIM)-capacitors with elevated-electrode realised on ...
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