ALBANY, N.Y.--(BUSINESS WIRE)--SEMATECH announced today that researchers have reached a significant milestone in reducing tool-generated defects from multi-layer deposition of mask blanks used for ...
Experimental and numerical analysis of the potential drop method for defects caused by dynamic loads
Comparison of the measurement results (dots) and simulation results (solid line) for the defect-induced change for a PDM setup of case 4 as a function of the crack depth. In our paper “Experimental ...
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